Picture of Plasma Cleaner PPS
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Thai Anh Tuan Nguyen
2nd Responsible:
Thomas Marthinsen
Files
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Description
Details
Tool name:
Plasma Cleaner PPS
Area/room:
G2-33 Cleanroom
Category:
Dry etching
Manufacturer:
PPS
Model:
AL18, Sn. 3212/1709
Tool rate:
B
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Tool Modes
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