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| Acoustic material characterisation | Characterization | Olympus, Panametrics & LeCroy | 1 |
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| Acoustic Pulse-Echo measurements | Characterization | NI | PCI-5412, PCI-5122 |
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| AFM XE-200 | Characterization | Park Systems Co. | XE-200 |
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View
| Au sputter VG Microtech SC500 | Thin film deposition | VG microtech | Polaron SC500 |
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| Autoclave | Chemical and Biological methods | Panasonic | MLS3751L |
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| Ball bonder - TPT HB100 | Bonding and packaging | TPT | TPT HB100 |
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| Bio-bench 1 | Work bench | - | - |
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| Bio-bench 2 | Work bench | - | - |
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| Bio-bench 3 | Work bench | - | - |
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| Bio-bench 4 | Work bench | - | - |
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| Bio-bench 5 | Work bench | - | - |
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| Bio-bench 6 | Work bench | - | - |
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| Biological Safety Cabinet 2 BIO | Chemical and Biological methods | Esco | Nordicsafe |
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| Biological Safety Cabinet 3 BIO | Chemical and Biological methods | Esco | Nordicsafe |
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| Bond pull tester Micropull | Bonding and packaging | Unitek | Micropull |
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| Centrifuge Eppendorf 5702R | Chemical and Biological methods | Eppendorf | Centrifuge 5702R |
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| Centrifuge MiniSpin | Chemical and Biological methods | Eppendorf AG | MiniSpin plus |
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| Cleaner BioTek ELX50 | Chemical and Biological methods | BioTek | ELX50 |
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| Climate Cabinet (Weiss) | Thermal processes | Weiss Technik | 64 |
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| Climate test chamber | Thermal processes | CTS | C-40/100 |
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| CNT-reactor | Thermal processes | IMST Lab | CNT-reactor |
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| Consort Multi-parameter analyser | Chemical and Biological methods | Consort bvba | C3040 |
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| Cryofreezer | Thermal processes | Panasonic | MDF-1156 |
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| Dicing saw Disco DAD-2H/6T | Sawing | Disco | DAD-2H/6T Semi-Auto Dicing Saw |
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| Dicing Saw, Disco 321 | Sawing | DISCO | 321 |
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| Dicing saw, Disco DAD 3220 | Sawing | Disco | DAD 3220 |
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| Die Attach Laurier Inc. | Bonding and packaging | Laurier Incorporated | Laurier Incorporated |
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| Die Bonder, TPT | Bonding and packaging | TPT | HB70 |
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| Dispencer Chemyx Micro Syringe pump 1 | Chemical and Biological methods | Chemyx | Micro Syringe pump 1 |
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| DRIE Deep Si etcher | Dry etching | Oxford Instruments Ltd | 100 Estrelas |
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| Edvocycler | Chemical and Biological methods | Edvotech | Edvocycler |
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| Electrochemical workstation | Chemical and Biological methods | Zahner IM6 | IM6 |
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| Electroplating Ni | Thin film deposition | Rena | EMP 100 F |
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| Electroplating of Cu and Sn | Thin film deposition | Heimerle + Meule | PGG 20 |
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| Elektro Chemical workstation | Chemical and Biological methods | Bio-Logic SAS | VSP-300, SN. 0542 |
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| Elektro Phoresis | Chemical and Biological methods | Fisher Brand | Elektro Phoresis unit 1 |
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| Elektro Phoresis | Chemical and Biological methods | Fisher Brand | Elektro Phoresis unit 2 |
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| Elipsometer | Characterization | Wollam Co. | alpha SE |
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| Flip-chip bonder FinePlacer Pico (Automatic Force 2-700 N) | Bonding and packaging | FineTech GmbH (Germany) | FinePlacer Pico |
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| Flip-chip bonder FinePlacer Pico (Manual Force 1-40 N) | Bonding and packaging | FineTech GmbH, Germany | FinePlacer pico |
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| Fume Hood 1- BIO | Chemical and Biological methods | Esco | Frontier |
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| Fume Hood 2 -BIO | Chemical and Biological methods | Esco | Frontier |
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| Fume Hood 3- BIO | Chemical and Biological methods | Esco | Frontier |
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| Fume Hood 4 for General Solvents | Lithography | Esco | Frontier |
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| Fume Hood 5 for corrosive chemicals | Lithography | Esco | Frontier |
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| Fume Hood 6- Au electroplating, Ti etch | Thin film deposition | Esco | Frontier |
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| Fume hood 7 - Corrosive | Lithography | Kebo Lab | DFL12P |
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| Gas chromatograph,Shimadzu | Characterization | Shimadzu | Tracera GC-2010 Plus |
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| Glovebox | Other | MBraun | EasyLab |
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| Grinding Struers Knuth rotor | Sample Preparation | Struers | Knuth Rotor |
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| Hall Instrument | Characterization | East Changing | CME-12, Sn. C17120024 |
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| He- Leak Detector | Characterization | Pfeiffer | ASM 340, PN 121762 |
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| High temperature furnace | Thermal processes | Nabertherm | LHT 02/17 |
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| Impedance measurement | Characterization | R&S | ZVL3 |
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| Incubator Binder CB150 | Chemical and Biological methods | Binder | CB150 |
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| Incubator Labnet | Chemical and Biological methods | Labnet | MiniIncubator |
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| Incubator, Orbital shaker | Chemical and Biological methods | BioSan | ES-20/60 |
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| Interferometer Wyko NT9100 | Characterization | Wyko | NT9100 |
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| ION MILLING IM4000 | Sample Preparation | HITACHI | IM4000 |
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| IR-Camera Pixelink PL-B74EF | Bonding and packaging | Pixelink | PL-B741EF |
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| Laminar flow bench 1 BIO | Chemical and Biological methods | Clean Air | BSC |
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| Laminar flow bench 4 Metal finger | Thin film deposition | Esco | Nordicsafe |
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| Laser Cutting Machine | Other | Feiljia | H4030 |
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View
| Mask Aligner - Karl Suss MA56 (new) | Lithography | Karl Suss | MA 56 |
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| Mask Aligner EVG 620 | Lithography | EVG | EVG 620 |
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| Maskless aligner | Lithography | 4Pico | Picomaster 150 |
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| MultiPrep system for grinding/polishing Allied | Sample Preparation | Allied | MultiPrep system |
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| Optical Lab | Other | IMST | Latest |
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| Optical Microscope I Leica DM4000M | Characterization | Leica microsystem | DM 4000M |
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| Optical Microscope II Neophot 32 | Characterization | Carl Zeiss Jena | Neophot 32 |
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| Optical microscope Leica DM3 XL | Characterization | Leica | DM3 XL |
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| Optical Microscope Olympus IX51/TH4-200 | Characterization | Olympus | IX51/TH4-200 |
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| Optical Microscope, Zeiss V12 | Bonding and packaging | Zeiss | Discovery V12 |
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View
| Oven Binder MB6 | Thermal processes | Binder | MB6 |
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View
| Oxidation Oven Harmbridge HiTech furnace | Thermal processes | HarmbridgeHitech Furnace | HarmbridgeHitech Furnace |
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View
| Plasma Cleaner Addax | Thin film deposition | Addax | 506 |
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| Plasma Cleaner PPS | Dry etching | PPS | AL18, Sn. 3212/1709 |
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| Polishing Equipment 1 Struers DP10 | Sample Preparation | Struers | DP10 |
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| Polishing Equipment 2 Struers DP20 | Sample Preparation | Struers | DP20 |
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| Polishing Equipment, Logitech PM5 | Sample Preparation | Logitech | PM5 |
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| Post Cure Chamber | Thermal processes | EGT Servis | Curing oven, Sn. 210/2-2012 |
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| Probe Station PWS Probe II | Characterization | PWS (Pacific Western System Inc.) | Probe II |
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| Probe station RF | Characterization | Micromanipulator | Micromanipilator |
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| Probe Station, Pasific Western | Characterization | Pasific Western System | Probe II System |
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| Probestation Cryo, Lakeshore | Characterization | Lakeshore | CPX |
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View
| Profilometer DEKTAK 150 | Thin film deposition | Veeco Instruments Inc. | Dektak 150 Stylus ProfilerScan |
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| Reader 1 Tecan Spectra Fluor | Chemical and Biological methods | Tecan | Spectra Fluor |
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| Reader 2 Bio Tek Synergy2 | Chemical and Biological methods | BioTek | Synergy2 |
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| Rinse and dry STI Semitool | Lithography | STI Semitool | STI Semitool |
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| SAM 300, PVA TePLA | Characterization | PVA TePLA | SAM300 |
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| Scanning tank, Onda | Characterization | Onda | AIMS III |
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| SEM Hitachi SU 3500 | Characterization | Hitachi | SU3500 |
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| SEM Hitachi SU 8230 | Characterization | Hitachi | SU 8230 |
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| Shaker, LDS PA2000 | Metrology | Ling dynamic systems | PA 2000 |
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| Shear tester Delvotec 5600 | Bonding and packaging | F&K | Delvotec 5600 |
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View
| Spectrofluorometer FS5 | Characterization | Edinbourgh Instruments | FS5 |
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| Speed Mixer DAC 150 FVZ-K | Sample prep | Synergy Devices Limited | DAC 150 FVZ-K |
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| Spinner 1 Semitool 1 | Lithography | semitool | 1 |
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| Spinner 2 AB Plast Spin 150 | Lithography | AB Plast | spin150 |
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| Sputter AJA | Thin film deposition | AJA International Inc. | ATC 20x20x30 |
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| StepOnePlus real-time PCR | Chemical and Biological methods | Applied Biosystems | StepOnePlus |
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| Temp Chamber Heraeus Kendro | Thermal processes | Heraeus | UT6060 |
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| Temp chamber Heraeus Kendro | Thermal processes | Heraeus | UT6200 |
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| Temp chamber Lenton 202 | Thermal processes | Lenton | 202 |
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| Temperature Shock chamber | Thermal processes | CTS | TSS 70/32, SN. 177321 |
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| Thermal Chamber Heraeus T6200 | Thermal processes | Heraeus | T6200 |
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| Thermal Chamber Lenton WHT6/30 | Thermal processes | Lenton | WHT6/30 |
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| Thermal Chamber Thermaks TS4115 | Thermal processes | Thermaks | TS4115 |
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| Thermal Chamber, Heraeus Wötsch | Thermal processes | Heraeus Wötsch | VMT 07/35 |
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| Thermal Evaporator Moorfield MiniLab T25M | Thin film deposition | Moorfield Associates | MiniLab T25M |
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| Thermoshaker TS-100 | Thermal processes | BioSan | TS-100 |
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| Tube furnace 2" (new), GSL-1100X-S | Thermal processes | MTI Co. | GSL-1100X-S, Sno. G117071SU |
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| Tube Furnace High Temperature 2" | Thermal processes | MTI Corporation | MSL |
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| Ultrasonic bath FB15051 | Bonding and packaging | Fisher Scientific | FB15051 |
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| Ultrasonic Cleaning Brandson | Bonding and packaging | Brandson?? | ??? |
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| UV Photospectrometer, Shimadzu | Chemical and Biological methods | Shimadzu | UV-2600 |
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| Vacuum Chamber | Other | General purpose | - |
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| Vacuum welder, Budatec | Bonding and packaging | Budatec | VS160 UG |
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| Wafer Bonding System EVG 501 | Bonding and packaging | Electronic Visions Group (EVG) | EVG501 |
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| Wet Etching AB Plast | Lithography | Plast AB | Home made |
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| Wire bonder (Ball) | Bonding and packaging | TPT | HB16, Sn 205 |
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View
| Wire Bonder (Ball) Delvotec 5610 | Bonding and packaging | F&K | Delvotec 5610 |
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| Wire bonder(wedge), TPT | Bonding and packaging | TPT | HB12 |
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| Wirebonder (Ball) manual Delvotek5410 | Bonding and packaging | Delvotek | 5410 |
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| XRD | Characterization | Thermo Fisher | Equinox 1000, Sn.1612EQ1000137 |