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| Acoustic material characterisation | Characterization | B | Olympus, Panametrics & LeCroy | 1 |
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| Acoustic Pulse-Echo measurements | Characterization | B | NI | PCI-5412, PCI-5122 |
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| AFM XE-200 | Characterization | C | Park Systems Co. | XE-200 |
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| AlN sputter | Thin film deposition | E | Plasmatherm | Endeavor M1 |
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View
| Au sputter VG Microtech SC500 | Thin film deposition | A | VG microtech | Polaron SC500 |
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| Autoclave | Chemical and Biological methods | A | Panasonic | MLS3751L |
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| Autoclave, Tuttnauer | Thermal processes | A | Tuttnauer | 5075ELV-D |
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| Bio-bench 1 | Work bench | A | - | - |
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| Bio-bench 2 | Work bench | A | - | - |
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| Bio-bench 3 | Work bench | A | - | - |
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| Bio-bench 4 | Work bench | A | - | - |
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| Bio-bench 5 | Work bench | A | - | - |
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| Bio-bench 6 | Work bench | A | - | - |
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| Biological Safety Cabinet 2 BIO | Chemical and Biological methods | A | Esco | Nordicsafe |
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| Biological Safety Cabinet 3 BIO | Chemical and Biological methods | A | Esco | Nordicsafe |
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| Bond pull tester Micropull | Bonding and packaging | A | Unitek | Micropull |
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View
| Centrifuge Eppendorf 5702R | Chemical and Biological methods | A | Eppendorf | Centrifuge 5702R |
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| Centrifuge MiniSpin | Chemical and Biological methods | A | Eppendorf AG | MiniSpin plus |
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View
| CFX Opus 96 Real-Time PCR System | Chemical and Biological methods | A | Bio-Rad | CFX Opus 96 |
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View
| Cleaner BioTek ELX50 | Chemical and Biological methods | A | BioTek | ELX50 |
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| Climate Cabinet (Weiss) | Thermal processes | A | Weiss Technik | 64 |
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| Climate test chamber | Thermal processes | A | CTS | C-40/100 |
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| CNT-reactor | Thermal processes | A | IMST Lab | CNT-reactor |
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| Consort Multi-parameter analyser | Chemical and Biological methods | A | Consort bvba | C3040 |
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View
| Critical Point Dryer | Bonding and packaging | B | Tousimis | Automegasamdri-915B |
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| Cryofreezer | Thermal processes | A | Panasonic | MDF-1156 |
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| Dicing saw DAD3360 | Other | D | Disco | DAD3360 |
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| Dicing saw Disco DAD-2H/6T | Sawing | B | Disco | DAD-2H/6T Semi-Auto Dicing Saw |
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| Dicing Saw, Disco 321 | Other | D | Disco | 321 |
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| Dicing saw, Disco DAD 3220 | Sawing | D | Disco | DAD 3220 |
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| Die Attach Laurier Inc. | Bonding and packaging | A | Laurier Incorporated | Laurier Incorporated |
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| Die Bonder, TPT | Bonding and packaging | B | TPT | HB70 |
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| Dispencer Chemyx Micro Syringe pump 1 | Chemical and Biological methods | A | Chemyx | Micro Syringe pump 1 |
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View
| DRIE Deep Si etcher | Dry etching | D | Oxford Instruments Ltd | 100 Estrelas |
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| DSC Calorimeter 8500 (SINTEF) | Characterization | A | Perkin Elmer | DSC 8500 |
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| DSC Calorimeter Perkin Elmer DSC4000 | Characterization | A | Perkin Elmer | DSC 4000 |
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| Edvocycler | Chemical and Biological methods | A | Edvotech | Edvocycler |
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View
| Electrochemical Workstation BIO Logic SAS | Chemical and Biological methods | A | Bio-Logic SAS | VSP-300, SN. 0542 |
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View
| Electrochemical workstation Zahner IM6 | Chemical and Biological methods | A | Zahner IM6 | IM6 |
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View
| Electrochemical Workstation Zahner Zennium | Characterization | A | Zahner | Zennium-XC, sn. 42042 |
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| Electroplating Cu- Rena | Thin film deposition | D | Rena | EMP 100 F |
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| Electroplating of Cu and Sn | Thin film deposition | B | Heimerle + Meule | PGG 20 |
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| Elektro Phoresis | Chemical and Biological methods | A | Fisher Brand | Elektro Phoresis unit 1 |
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| Elektro Phoresis | Chemical and Biological methods | A | Fisher Brand | Elektro Phoresis unit 2 |
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| Elipsometer | Characterization | C | Wollam Co. | alpha SE |
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| Flip-chip bonder FinePlacer Pico (Automatic Force 2-700 N) | Bonding and packaging | B | FineTech GmbH (Germany) | FinePlacer Pico |
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| Flip-chip bonder FinePlacer Pico (Manual Force 1-40 N) | Bonding and packaging | C | FineTech GmbH, Germany | FinePlacer pico |
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| Freeze-drier | Thermal processes | A | Labconco | FreeZone Triad |
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| FTIR | Characterization | C | Thermo Fischer | Nicolet iS50 |
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| Fume Hood 1- Biochemistry | Chemical and Biological methods | A | Esco | Frontier |
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| Fume Hood 2 - Biochemistry | Chemical and Biological methods | A | Esco | Frontier |
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| Fume Hood 3 - Biochemistry | Chemical and Biological methods | A | Esco | Frontier |
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| Fume Hood 4 for General Solvents | Lithography | A | Esco | Frontier |
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| Fume Hood 5 for corrosive chemicals | Lithography | A | Esco | Frontier |
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| Fume Hood 6- | Wet process benches | A | Esco | Frontier |
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| Fume hood 7 - Corrosive | Lithography | A | Kebo Lab | DFL12P |
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View
| Fumehood nr 8 for Gold etching | Chemical and Biological methods | A | Kebo Lab | Gold etching |
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| Gas chromatograph,Shimadzu | Characterization | A | Shimadzu | Tracera GC-2010 Plus |
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View
| Gas Cromatograph, ThermoFisher | Characterization | E | Thermofisher Scientific | Trace 1300, SN: 72110233 |
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| Glovebox | Other | A | MBraun | EasyLab |
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| Grinding Struers Knuth rotor | Sample Preparation | A | Struers | Knuth Rotor |
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| Hall Instrument | Characterization | C | East Changing | CME-12, Sn. C17120024 |
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| Hauschild Speedmixer® DAC 150 FVZ-K | Chemical and Biological methods | A | Hauschild | DAC 150 FVZ-K |
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| He- Leak Detector | Characterization | A | Pfeiffer | ASM 340, PN 121762 |
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| HF/BOE etcher | Chemical and Biological methods | E | Osiris | Chemixx E 30 |
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| High temperature furnace | Thermal processes | A | Nabertherm | LHT 02/17 |
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| Impedance measurement | Characterization | A | R&S | ZVL3 |
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| Incubator Binder CB150 | Chemical and Biological methods | A | Binder | CB150 |
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View
| Incubator Labnet | Chemical and Biological methods | A | Labnet | MiniIncubator |
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View
| Incubator, Orbital shaker | Chemical and Biological methods | A | BioSan | ES-20/60 |
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| Interferometer Wyko NT9100 | Characterization | B | Wyko | NT9100 |
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| ION MILLING IM4000 | Sample Preparation | C | HITACHI | IM4000 |
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| IR-Camera Pixelink PL-B74EF | Bonding and packaging | A | Pixelink | PL-B741EF |
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| Laminar flow bench 1 BIO | Chemical and Biological methods | A | Clean Air | BSC |
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| Laminar flow bench 4 Metal finger | Thin film deposition | A | Esco | Nordicsafe |
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| Laser Cutting Machine | Other | A | Feiljia | H4030 |
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| Laser Welder, Elettrolaser | Other | A | Elettrolaser | Orion LZR, sn LZR1211 |
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| Laser Vibrometer Lyncee interferometer | Characterization | D | Lyncee tec | DHM-R2104 |
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| Mask Aligner - Karl Suss MA56 | Lithography | A | Karl Suss | MA 56 |
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| Mask Aligner EVG 620 | Lithography | B | EVG | EVG 620 |
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| Maskless aligner | Lithography | B | 4Pico | Picomaster 150 |
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| MTI Vacuum oven | Thermal processes | A | MTI | DZF-6060 |
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| NanoDrop | Chemical and Biological methods | A | Thermo Fisher | Lite Plus |
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| No 1 Tube Furnace High Temperature 2" | Thermal processes | A | MTI Corporation | MSL |
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| No 2 Tube furnace 2" (new), For Annealing & CVD | Thermal processes | A | MTI Co. | GSL-1100X-S, Sno. G117071SU |
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| No 3 SAFTherm 1700°C oven | Thermal processes | A | SAFTherm | STG-60-17 |
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| Optical Lab | Other | A | IMST | Latest |
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| Optical Microscope I Leica DM4000M | Characterization | A | Leica microsystem | DM 4000M |
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View
| Optical Microscope II Neophot 32 | Characterization | B | Carl Zeiss Jena | Neophot 32 |
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| Optical microscope Leica DM3 XL | Characterization | A | Leica | DM3 XL |
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| Optical Microscope Olympus IX51/TH4-200 | Characterization | A | Olympus | IX51/TH4-200 |
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| Optical Microscope Olympus MVX10 | Characterization | A | Olympus | MVX10 |
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View
| Optical Microscope, Zeiss V12 | Bonding and packaging | B | Zeiss | Discovery V12 |
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| Oven Binder 961 | Thermal processes | A | Binder | Model 9010-0191, SN 06-05292 |
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| Oven Binder 961 | Thermal processes | A | Binder | Model 9010-0191, SN 06-05289 |
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| Oven Binder MB6 | Thermal processes | A | Binder | MB6 |
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| Oven Termaks | Thermal processes | A | Termaks AS | TS 8024 |
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| Oven Thermaks | Thermal processes | A | Thermaks | TS9135 |
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View
| Oxidation Oven Harmbridge HiTech furnace | Thermal processes | A | HarmbridgeHitech Furnace | HarmbridgeHitech Furnace |
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| Plasma Cleaner Addax | Thin film deposition | A | Addax | 506 |
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| Plasma Cleaner PPS | Dry etching | B | PPS | AL18, Sn. 3212/1709 |
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| Point welder | Other | A | Sunstone | Linear DC |
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| Polishing Equipment 1 Struers DP10 | Sample Preparation | A | Struers | DP10 |
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| Polishing Equipment 2 Struers DP20 | Sample Preparation | A | Struers | DP20 |
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| Polishing Equipment, Logitech PM5 | Sample Preparation | A | Logitech | PM5 |
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| Polishing Grinding Struers Tegamarin-30 | Sample Preparation | B | Struers | Tegamarin-30 |
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| Polishing MultiPrep system for grinding/polishing Allied | Sample Preparation | A | Allied | MultiPrep system |
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| Post Cure Chamber | Thermal processes | A | EGT Servis | Curing oven, Sn. 210/2-2012 |
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View
| Probe Station PWS Probe II | Characterization | A | PWS (Pacific Western System Inc.) | Probe II |
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View
| Probe station RF | Characterization | A | Micromanipulator | Micromanipilator |
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View
| Probe Station, Pasific Western | Characterization | A | Pasific Western System | Probe II System |
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View
| Probestation Cryo, Lakeshore | Characterization | A | Lakeshore | CPX |
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View
| Profilometer Bruker Dektak XT | Characterization | B | Bruker | Dektak XT |
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View
| Profilometer DEKTAK 150 | Characterization | A | Veeco Instruments Inc. | Dektak 150 Stylus ProfilerScan |
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| Qubit | Chemical and Biological methods | A | invitrogen | Qubit 4 Flurometer |
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| Reader 1 Tecan Spectra Fluor | Chemical and Biological methods | A | Tecan | Spectra Fluor |
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View
| Reader 2 Bio Tek Synergy2 | Chemical and Biological methods | A | BioTek | Synergy2 |
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View
| Rinse and dry STI Semitool | Lithography | A | STI Semitool | STI Semitool |
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| SAM 300, PVA TePLA | Characterization | C | PVA TePLA | SAM300 |
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| Scanning tank, Onda | Characterization | A | Onda | AIMS III |
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| Screen printer | Other | A | SMTECH | Quad 100 MV |
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| SEM Hitachi SU 3500 | Characterization | C | Hitachi | SU3500 |
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| SEM Hitachi SU 8230 | Characterization | E | Hitachi | SU 8230 |
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| Shaker GFL 3005 | Other | A | GFL | 3005 |
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| Shaker, LDS PA2000 | Other | A | Ling dynamic systems | PA 2000 |
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View
| Shear Bond Tester | Bonding and packaging | A | Nordson Dage | 4000 Plus Mainframe |
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View
| Shear tester Delvotec 5600 | Bonding and packaging | A | F&K | Delvotec 5600 |
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| Spectrofluorometer FS5 | Characterization | A | Edinbourgh Instruments | FS5 |
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| Spektrometer Optima 2100 | Characterization | A | Perkin Elmer | Optima 2100 DV |
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| Spinner 1 Semitool 1 | Lithography | A | semitool | 1 |
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| Spinner 2 AB Plast Spin 150 | Lithography | A | AB Plast | spin150 |
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| Spinner Polos | Lithography | A | SPS | Spin150i |
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| Spinner, Spin 150i | Lithography | A | RK-AHT | Spin 150i Bench top |
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| Sputter AJA | Thin film deposition | D | AJA International Inc. | ATC 20x20x30 |
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| StepOnePlus real-time PCR | Chemical and Biological methods | A | Applied Biosystems | StepOnePlus |
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| Temp Chamber Heraeus Kendro | Thermal processes | A | Heraeus | UT6060 |
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View
| Temp chamber Heraeus Kendro | Thermal processes | A | Heraeus | UT6200 |
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| Temp chamber Lenton 202 | Thermal processes | A | Lenton | 202 |
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| Temperature Shock chamber | Thermal processes | A | CTS | TSS 70/32, SN. 177321 |
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| Thermal Chamber Heraeus T6200 | Thermal processes | A | Heraeus | T6200 |
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| Thermal Chamber Thermaks TS4115 | Thermal processes | A | Thermaks | TS4115 |
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| Thermal Chamber, Heraeus Wötsch | Thermal processes | A | Heraeus Wötsch | VMT 07/35 |
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| Thermal Evaporator Moorfield MiniLab T25M | Thin film deposition | C | Moorfield Associates | MiniLab T25M |
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| Thermoshaker TS-100 | Thermal processes | A | BioSan | TS-100 |
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| Ultrasonic Bath Brandson | Bonding and packaging | A | Brandson | 8510E-DTH |
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| Ultrasonic bath FB15051 | Bonding and packaging | A | Fisher Scientific | FB15051 |
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| UV Photospectrometer, Shimadzu | Chemical and Biological methods | A | Shimadzu | UV-2600 |
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| Vacuum Chamber | Other | A | General purpose | - |
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View
| Vacuum packer | Bonding and packaging | A | Sousvide | SVT-300-CVP |
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View
| Vacuum Solder, Budatec | Bonding and packaging | A | Budatec | VS160 UG |
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| Wafer Bonding System EVG 501 | Bonding and packaging | B | Electronic Visions Group (EVG) | EVG501 |
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| Wet Etching AB Plast | Lithography | B | Plast AB | Home made |
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| Wire Bonder (Ball) Delvotec 5610 | Bonding and packaging | C | F&K | Delvotec 5610 |
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View
| Wire bonder Ball - TPT HB100 | Bonding and packaging | C | TPT | TPT HB100 |
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| Wire bonder TPT HB16 (Ball) | Bonding and packaging | B | TPT | HB16, Sn 205 |
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| Wire bonder(wedge), TPT HB12 | Bonding and packaging | C | TPT HB12 | HB12 |
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| Wirebonder (Ball) manual Delvotek5410 | Bonding and packaging | C | Delvotek | 5410 |
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| XRD | Characterization | C | Thermo Fisher | Equinox 1000, Sn.1612EQ1000137 |
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| XRF | Characterization | C | Rigaku | Supermini 200 |