Picture of No 2 Tube furnace 2" (new), For Annealing & CVD
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Thomas Marthinsen
2nd Responsible:
Anh Tuan Thai Nguyen
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Description

Tube furnace for annealing and CVD.

Ar, H2, C2H2, N2 + Ar attached to this furnace.

Details
Tool name:
No 2 Tube furnace 2" (new), For Annealing & CVD
Area/room:
G2-33 Cleanroom
Category:
Thermal processes
Manufacturer:
MTI Co.
Model:
GSL-1100X-S, Sno. G117071SU
Tool rate:
A
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