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AlN sputter (4080)
Current status:
DOWN
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Responsibles
1st Responsible:
Anh Tuan Thai Nguyen
2nd Responsible:
Thomas Marthinsen
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Description
Details
Tool name:
AlN sputter
Area/room:
G2-33 Cleanroom
Category:
Thin film deposition
Manufacturer:
Plasmatherm
Model:
Endeavor M1
Tool rate:
E
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