Picture of AlN sputter
Current status:
DOWN
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Anh Tuan Thai Nguyen
2nd Responsible:
Thomas Marthinsen
Files
You must be logged in to view files.
Description
Details
Tool name:
AlN sputter
Area/room:
G2-33 Cleanroom
Category:
Thin film deposition
Manufacturer:
Plasmatherm
Model:
Endeavor M1
Tool rate:
E
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.