Tools
All tools
Tool status
Info
General documents
Sitemap
User access
Login
USN
Ntnu
Uio
Sintef
No access?
Apply for access
here...
Login
U
sername:
P
assword:
Forgot your password?
Sputter AJA (4050)
Current status:
AVAILABLE
Book
|
Log
|
Show/Collapse all
Responsibles
1st Responsible:
Kaiying Wang
2nd Responsible:
Anh Tuan Thai Nguyen
Files
You must be logged in to view files.
Description
TARGETS FOR SPUTTRING : Au, Ti 90 W10 wt%, Ti10W90 wt%, Cu, SiO
2
.
TARGETS FOR E- BEAM: Ti, Ni,Cr.
Details
Tool name:
Sputter AJA
Area/room:
G2-33 Cleanroom
Category:
Thin film deposition
Manufacturer:
AJA International Inc.
Model:
ATC 20x20x30
Tool rate:
D
Instructors & Licensed Users
Instructors
Licensed Users
Tool Modes
You must be logged in to view tool modes.
This may take a while...please wait.
×
User Information
Name:
Telephone:
Mobile:
E-mail:
University/Company:
Laboratory:
Send Message
Subject:
Message:
Send